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Diagram of an ecr-mpcvd system

diagram of an ecr-mpcvd system

I want you to draw the ecr-mpcvd system diagram. The parts that need to be there; 1-methane gas. 2- microwave genereator deflection source. 3- gas control system. 4- ion gun. 5- substrate holder 6- reaction chamber and observation window. 7- turbo molecular pump 8- mechanical pump. Ver mais

#diagram #research equipment #scientific illustration

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