Three technical schematics show the process of creating gate-all-around technology from a Si/SiGe multilayer film stack.
make 3 schematics step by step for gate all around technology using Si substrate/SiGe/Si/SiGe/Si/SiGe/Si/SiGe/Si Cap multilayer film stack then etch the SiGe layers then preserve the Si as channels Voir plus