I need an illustration showcasing different options to transport wafers from one equipment to another in the context of semiconductor manufacturing. For this please draw two idealized semiconductor manufacturing equipment on either side with their loadports clearly visible. Inbetween there should be three different modes of transports. First, in the upper section, an OHT vehicle, i.e. Overhead Hoist Transport Vehicle, transporting a FOUP. In the middle, there should be a FOUP on a conveyor and on the floor there should be an Automated guided vehicle with a robotic arm holding a FOUP See more